INVESTIGATION OF METAL-INSULATOR-SEMICONDUCTOR STRUCTURES WITH AL2O3 INSULATING LAYERS OBTAINED BY ELECTRON-GUN EVAPORATION

被引：6
作者：
LECONTELLEC, M
MORIN, F
机构：
来源：
THIN SOLID FILMS | 1978年 / 52卷 / 01期
关键词：
D O I：
10.1016/0040-6090(78)90255-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：63 / 68
页数：6
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