AMORPHIZATION AND RECRYSTALLIZATION OF INSB ION-IMPLANTED LAYERS

被引：13
|
作者：
CHERNYSHEVA, NY
KACHURIN, GA
BOGATYRIOV, VA
机构：
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1978年 / 47卷 / 01期
关键词：
D O I：
10.1002/pssa.2210470141
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：K5 / &
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