DECHANNELING BY DISLOCATIONS IN ION-IMPLANTED AL

被引:68
作者
PICRAUX, ST [1 ]
RIMINI, E [1 ]
FOTI, G [1 ]
CAMPISANO, SU [1 ]
机构
[1] IST STRUTTURA MAT,CATANIA,ITALY
来源
PHYSICAL REVIEW B | 1978年 / 18卷 / 05期
关键词
D O I
10.1103/PhysRevB.18.2078
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:2078 / 2096
页数:19
相关论文
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