REACTIVELY SPUTTERED TANTALUM THIN FILM RESISTORS .1. PHYSICAL AND ELECTRICAL PROPERTIES

被引：21
作者：
HARDY, WR
SHEWCHUN, J
KUENZIG, D
TAM, C
机构：
来源：
THIN SOLID FILMS | 1971年 / 8卷 / 02期
关键词：
D O I：
10.1016/0040-6090(71)90001-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：81 / &
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