NONLINEAR VIBRATIONS AND HYSTERESIS OF MICROMACHINED SILICON RESONATORS DESIGNED AS FREQUENCY-OUT SENSORS

被引:29
作者
ANDRES, MV
FOULDS, KWH
TUDOR, MJ
机构
[1] UNIV SURREY, DEPT PHYS, GUILDFORD GU2 5XH, SURREY, ENGLAND
[2] UNIV VALENCIA, DEPT FIS APLICADA, VALENCIA, SPAIN
关键词
D O I
10.1049/el:19870670
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:952 / 954
页数:3
相关论文
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Pitt G. D., 1985, IEE Proceedings J (Optoelectronics), V132, P214, DOI 10.1049/ip-j.1985.0047