INVESTIGATION OF ACOUSTIC SENSING FOR LASER MACHINING PROCESSES .1. LASER DRILLING

被引：11

作者：

SHENG, P ^{[1
]}

CHRYSSOLOURIS, G ^{[1
]}

机构：

[1] MIT,MFG & PROD LAB,CAMBRIDGE,MA 02139

来源：

JOURNAL OF MATERIALS PROCESSING TECHNOLOGY | 1994年 / 43卷 / 2-4期

关键词：

ACOUSTIC SENSING; LASER MACHINING; LASER DRILLING; ACOUSTIC EMISSION;

D O I：

10.1016/0924-0136(94)90017-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

An acoustic sensing technique has been developed for the in-process sensing of the erosion front condition during laser machining. This paper presents an analysis of acoustic sensing for blind and through-hole drilling. Theoretical analysis of the relationship between resonant frequency and hole geometry were performed using a Helmholtz resonator and wave equation models. The theoretical estimates are compared to experimental results for the laser drilling of acrylic, aluminum oxide and steel. Process control schemes for hole depth and beam breakthrough regulation using acoustic sensing are proposed.

引用

页码：125 / 144

页数：20

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[2]

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[3]

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[4]

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