TRAP DISTRIBUTION IN THIN DIAMOND-LIKE CARBON-FILMS

被引：8
|
作者：
STARYGA, E
机构：
[1] Technical University of Łódź, Institute of Physics, 93-005 Łódź
来源：
DIAMOND AND RELATED MATERIALS | 1994年 / 3卷 / 4-6期
关键词：
D O I：
10.1016/0925-9635(94)90287-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Trap levels in diamond-like carbon (DLC) films obtained by plasma-activated chemical vapour deposition in methane are investigated by using the thermally stimulated current (TSC) technique. Peaks are found on the TSC curve. The peaks arise from the thermal liberation of trapped carriers in the DLC films. A few methods to analyse the peak shape are applied to obtain the energy of the trap levels. It is shown that the energy of the trap levels decreases with increasing negative self-bias voltage V(c) of the R.F.-powered electrode.
引用
收藏
页码：865 / 867
页数：3
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