INFRARED-ABSORPTION OF OXYGEN-DOPED SILICON GROWN BY MOLECULAR-BEAM EPITAXY

被引:4
作者
LINDSTROM, JL
SVENSSON, BG
NI, WX
WILLANDER, M
机构
[1] ROYAL INST TECHNOL,S-16428 STOCKHOLM,SWEDEN
[2] LINKOPING UNIV,DEPT PHYS & MEASUREMENT TECHNOL,S-58111 LINKOPING,SWEDEN
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1990年 / 117卷 / 02期
关键词
D O I
10.1002/pssa.2211170252
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
[No abstract available]
引用
收藏
页码:K171 / K175
页数:5
相关论文
共 17 条
[1]   A STUDY OF THIN SILICON DIOXIDE FILMS USING INFRARED-ABSORPTION TECHNIQUES [J].
BOYD, IW ;
WILSON, JIB .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (06) :4166-4172
[3]   CONFIGURATION + DIFFUSION OF ISOLATED OXYGEN IN SILICON + GERMANIUM [J].
CORBETT, JW ;
MCDONALD, RS ;
WATKINS, GD .
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1964, 25 (08) :873-&
[4]  
FULLER CS, 1954, PHYS REV, V96, P833
[5]  
GRAFF K, 1973, SOLID STATE ELECTRON, V16, P309
[6]   THE SOLUBILITY OF OXYGEN IN SILICON [J].
HROSTOWSKI, HJ ;
KAISER, RH .
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1959, 9 (3-4) :214-216
[7]   INFRARED ABSORPTION OF OXYGEN IN SILICON [J].
HROSTOWSKI, HJ ;
KAISER, RH .
PHYSICAL REVIEW, 1957, 107 (04) :966-972
[9]   INFRARED ABSORPTION AND OXYGEN CONTENT IN SILICON AND GERMANIUM [J].
KAISER, W ;
KECK, PH ;
LANGE, CF .
PHYSICAL REVIEW, 1956, 101 (04) :1264-1268
[10]   COMPARISON OF 2 KINDS OF OXYGEN DONORS IN SILICON BY RESISTIVITY MEASUREMENTS [J].
KANAMORI, A ;
KANAMORI, M .
JOURNAL OF APPLIED PHYSICS, 1979, 50 (12) :8095-8101