PROBLEMS IN ELEMENTAL CONCENTRATION DEPTH PROFILING WITH AN ION MICROPROBE

被引:8
|
作者
SCHILLING, JH
BUGER, PA
机构
关键词
D O I
10.1016/0020-7381(78)80019-9
中图分类号
O64 [物理化学(理论化学)、化学物理学]; O56 [分子物理学、原子物理学];
学科分类号
070203 ; 070304 ; 081704 ; 1406 ;
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页码:163 / 172
页数:10
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