SIMPLE CONSIDERATIONS ON MICROANALYSIS USING ELECTRON-BEAMS

In this paper we review, in a quasi-consistent fashion, the equations of quantitation for three complementary electron beam microanalysis techniques which all use the same primary interaction event as the basis of analysis: electron energy-loss spectroscopy, X-ray emission spectroscopy and Auger electron spectroscopy. The equations are presented in the context of analysis using focused electron beams.