TEMPERATURE EFFECTS ON THE OPTICAL-PROPERTIES OF AMORPHOUS HYDROGENATED SILICON NITROGEN ALLOYS PREPARED BY RF SPUTTERING

被引：8

作者：

BERGER, JM ^{[1
]}

ANCE, C ^{[1
]}

DECHELLE, F ^{[1
]}

FERRATON, JP ^{[1
]}

DONNADIEU, A ^{[1
]}

CISNEROS, JI ^{[1
]}

DASILVA, JHD ^{[1
]}

机构：

[1] UNIV ESTADUAL CAMPINAS,INST FIS,BR-13100 CAMPINAS,SP,BRAZIL

来源：

关键词：

D O I：

10.1016/S0022-3093(87)80070-4

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：353 / 364

页数：12

共 32 条

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