TEMPERATURE EFFECTS ON THE OPTICAL-PROPERTIES OF AMORPHOUS HYDROGENATED SILICON NITROGEN ALLOYS PREPARED BY RF SPUTTERING

被引:8
作者
BERGER, JM [1 ]
ANCE, C [1 ]
DECHELLE, F [1 ]
FERRATON, JP [1 ]
DONNADIEU, A [1 ]
CISNEROS, JI [1 ]
DASILVA, JHD [1 ]
机构
[1] UNIV ESTADUAL CAMPINAS,INST FIS,BR-13100 CAMPINAS,SP,BRAZIL
关键词
D O I
10.1016/S0022-3093(87)80070-4
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:353 / 364
页数:12
相关论文
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