SIMS ANALYSIS OF DEUTERIUM DIFFUSION IN HYDROGENATED AMORPHOUS SILICON

被引：254
作者：
CARLSON, DE
MAGEE, CW
机构：
来源：
APPLIED PHYSICS LETTERS | 1978年 / 33卷 / 01期
关键词：
D O I：
10.1063/1.90153
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：81 / 83
页数：3
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