STUDY OF DENSITY IN PULSED-LASER DEPOSITED AMORPHOUS-CARBON FILMS USING X-RAY REFLECTIVITY

被引：42

作者：

HUAI, Y

CHAKER, M

BROUGHTON, JN

GAT, E

PEPIN, H

GU, T

BIAN, X

SUTTON, M

机构：

[1] INRS,VARENNES J3X IS2,PQ,CANADA

[2] MCGILL UNIV,DEPT PHYS,CTR PHYS MAT,MONTREAL H3A 2T8,QUEBEC,CANADA

来源：

APPLIED PHYSICS LETTERS | 1994年 / 65卷 / 07期

关键词：

D O I：

10.1063/1.112245

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report the accurate determination of the absolute density of the pulsed-laser deposited amorphous carbon ultrathin films as well as the film density evolution with the substrate temperatures T(s) (22-300-degrees-C) using high-resolution x-ray reflectivity. The density values rho for the films deposited with laser power density of 8 X 10(8) W/cm2 varied from 3.10 to 2.40 g/cm3 as the substrate temperature increased from 22 to 300-degrees-C. This result, together with the optical band-gap values obtained by transmittance measurements, clearly indicates a diamond-like to graphite-like microstructure change near T(s) = 200-degrees-C.

引用

页码：830 / 832

页数：3

共 14 条

[1] RAMAN-SCATTERING OF LASER-DEPOSITED AMORPHOUS-CARBON [J].