DIELECTRIC FUNCTION AND SURFACE MICROROUGHNESS MEASUREMENTS OF INSB BY SPECTROSCOPIC ELLIPSOMETRY

被引：83
|
作者：
ASPNES, DE
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 05期
关键词：
D O I：
10.1116/1.570590
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：1057 / 1060
页数：4
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