ION-BEAM PATTERNING OF SPIN-ON METALORGANIC PRECURSORS AND FORMATION OF HIGH TC-SUPERCONDUCTORS

被引:15
作者
GROSS, ME
BROWN, WL
DICENZO, SB
HARTFORD, EH
YEH, JJ
HONG, M
机构
关键词
D O I
10.1063/1.100564
中图分类号
O59 [应用物理学];
学科分类号
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页码:802 / 804
页数:3
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