ELECTRICAL MEASUREMENT OF THE FORMATION OF THE PLATINUM-RICH METAL SILICIDES BY METAL-SILICON REACTION

被引：5
|
作者：
GAS, P [1 ]
TARDY, J [1 ]
LEGOUES, F [1 ]
DHEURLE, FM [1 ]
机构：
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源：
APPLIED PHYSICS LETTERS | 1987年 / 50卷 / 17期
关键词：
D O I：
10.1063/1.97940
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1135 / 1137
页数：3
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