ELECTRICAL MEASUREMENT OF THE FORMATION OF THE PLATINUM-RICH METAL SILICIDES BY METAL-SILICON REACTION

被引：5

作者：

GAS, P ^{[1
]}

TARDY, J ^{[1
]}

LEGOUES, F ^{[1
]}

DHEURLE, FM ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

APPLIED PHYSICS LETTERS | 1987年 / 50卷 / 17期

关键词：

D O I：

10.1063/1.97940

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1135 / 1137

页数：3

共 16 条

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