MICROROBOT ACTUATED BY A VIBRATION ENERGY-FIELD

被引：42

作者：

YASUDA, T

SHIMOYAMA, I

MIURA, H

机构：

[1] Department of Mechano-Informatics, The University of Tokyo, Bunkyo-ku, Tokyo, 113

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1994年 / 43卷 / 1-3期

关键词：

D O I：

10.1016/0924-4247(93)00709-D

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A vibration energy field generated by a piezoelectric vibrator can supply a microrobot with power without using wires, by exciting resonant actuators mechanically. Furthermore, this energy field implicitly contains control signals that make it possible to activate actuators selectively. A microrobot measuring 1.5 mm x 0.7 mm has been fabricated using silicon micromachining technology and a folding process to make three-dimensional structures. The microrobot is modelled as a damped three-degree-of-freedom system driven by displacement excitation. The microrobot's design is determined from simulation results based on this model.

引用

页码：366 / 370

页数：5

共 7 条

[1]

AKIN T, 1990, IEEE SOL STAT SENS A, P145

[2]

BENECKE W, 1985, 3RD P INT C SOL STAT, P105

[3]

Fukuda T., 1991, Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (Cat. No.91CH2957-9), P210, DOI 10.1109/MEMSYS.1991.114798

[4]

KIMURA M, 1991, 1991 P IEEE MICR EL, P227

[5]

SUZUKI KI, 1992, P C ELECT B, P190, DOI 10.1109/MEMSYS.1992.187716

[6]

Tai Y.-C., 1989, Proceedings: IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (IEEE Cat. No.89THO249-3), P1, DOI 10.1109/MEMSYS.1989.77950

[7]

TAN WC, 1989, P IEEE MICRO ELECTRO, P53

← 1 →