共 36 条
[1]
ABRAMOV VN, 1978, FIZ TVERD TELA, V20, P399
[8]
OPTICAL-EMISSION FROM NEON OXYGEN RF SPUTTERING GLOW-DISCHARGES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1983, 1 (01)
:69-73
[9]
GLOW-DISCHARGE MASS-SPECTROMETRY FOR SPUTTERING DISCHARGE DIAGNOSTICS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
1985, 3 (03)
:625-630
[10]
AITA CR, 1986, VACUUM, V36, P85