THE ROLE OF SURFACE AND GAS-PHASE REACTIONS IN ATOMIC LAYER EPITAXY

被引：10

作者：

DAPKUS, PD ^{[1
]}

DENBAARS, SP ^{[1
]}

CHEN, Q ^{[1
]}

JEONG, WG ^{[1
]}

MAA, BY ^{[1
]}

机构：

[1] UNIV SO CALIF,DEPT MAT SCI,LOS ANGELES,CA 90089

来源：

PROGRESS IN CRYSTAL GROWTH AND CHARACTERIZATION OF MATERIALS | 1989年 / 19卷 / 1-2期

关键词：

D O I：

10.1016/0146-3535(89)90019-1

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：137 / 147

页数：11

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