INVESTIGATION OF THE GROWTH-KINETICS OF LOW-PRESSURE DIAMOND FILMS BY IN-SITU ELASTIC-SCATTERING OF LIGHT AND REFLECTIVITY

被引：34

作者：

BONNOT, AM

MATHIS, BS

MOULIN, S

机构：

[1] Laboratoire d'Etudes des Propriétés Electroniques, Centre National de la Recherche Scientifique, Associé À l'Université J. Fourier, 38042 Grenoble Cedex 09

来源：

APPLIED PHYSICS LETTERS | 1993年 / 63卷 / 13期

关键词：

D O I：

10.1063/1.110704

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A detailed analysis of in situ optical measurements of elastic scattering of light and reflectivity during diamond film synthesis is presented. From the results we propose a growth kinetic model for the very first stages when isolated tiny particles are formed and until they coalesce to form a continuous diamond film.

引用

页码：1754 / 1756

页数：3

共 7 条

[1]

BARBER PW, 1991, LIGHT SCATTERING PAR

[2] RAMAN MICROSPECTROSCOPY OF DIAMOND CRYSTALS AND THIN-FILMS PREPARED BY HOT-FILAMENT-ASSISTED CHEMICAL VAPOR-DEPOSITION [J].

BONNOT, AM .

PHYSICAL REVIEW B, 1990, 41 (09) :6040-6049

[3] INSITU INVESTIGATION OF LOW-PRESSURE DIAMOND GROWTH BY ELASTIC-SCATTERING OF LIGHT AND REFLECTANCE SPECTROSCOPY [J].

BONNOT, AM ;

LOPEZRIOS, T ;

MATHIS, BS ;

LEROY, J .

[4]

BORN M, 1991, PRINCIPLES OPTICS

[5] ELASTIC-SCATTERING OF LIGHT AND REFLECTIVITY DEVELOPMENT DURING LOW-PRESSURE DIAMOND FILM GROWTH [J].

MATHIS, BS ;

BONNOT, AM .

[6]

WILD C, 1991, 1991 P APPL DIAM C, P197

[7] CURRENT ISSUES AND PROBLEMS IN THE CHEMICAL VAPOR-DEPOSITION OF DIAMOND [J].

YARBROUGH, WA ;

MESSIER, R .

SCIENCE, 1990, 247 (4943) :688-696

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