CHANNELING DETECTION USING POSITION-SENSITIVE DETECTORS

被引：2

作者：

DEWACHTER, J ^{[1
]}

HENDRICKX, P ^{[1
]}

PATTYN, H ^{[1
]}

LANGOUCHE, G ^{[1
]}

BRIJS, B ^{[1
]}

VANDERVORST, W ^{[1
]}

机构：

[1] IMEC,B-3001 LOUVAIN,BELGIUM

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1993年 / 79卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(93)95479-O

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A channeling detection method based on the simultaneous measurement of several angular scans through the use of a position sensitive detector is presented. With respect to conventional channeling, it is both time saving and much more visual.

引用

页码：829 / 831

页数：3

共 4 条

[1] VARIOUS ADVANCED CAPABILITIES OF THE RBS SETUP AT IMEC [J].

BRIJS, B ;

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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 64 (1-4) :825-831

[2]

LINDHARD J, 1965, VIDENSK SELSK MAT FY, V34

[3] A POSITION-SENSITIVE PHOTON DETECTOR USED AS A CHARGED-PARTICLE DETECTOR [J].

LINDROOS, M ;

SKEPPSTEDT, O .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1991, 306 (1-2) :225-228

[4] UNUSUALLY LARGE SUBSTITUTIONAL FRACTION FOR FR IMPLANTED IN FE OBSERVED BY EMISSION CHANNELING [J].

LINDROOS, M ;

HAAS, H ;

DEWACHTER, J ;

PATTYN, H ;

LANGOUCHE, G .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 64 (1-4) :256-260

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