EPITAXIAL PT(001), PT(110), AND PT(111) FILMS ON MGO(001), MGO(110), MGO(111), AND AL2O3(0001)

被引:111
|
作者
LAIRSON, BM
VISOKAY, MR
SINCLAIR, R
HAGSTROM, S
CLEMENS, BM
机构
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D O I
10.1063/1.107547
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have grown epitaxial Pt films, both in oxidizing and nonoxidizing environments, using planar magnetron sputtering onto heated substrates. The out-of-plane orientation relationships we report are Pt(001) parallel-to MgO(001), Pt(110) parallel-to MgO(110), Pt(111) parallel-to MgO(111), and Pt(111) parallel-to Al2O3(0001). We also report a seeded epitaxy technique using Fe for lower temperature epitaxial growth of Pt(001) parallel-to MgO(001).
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页码:1390 / 1392
页数:3
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