DEVELOPMENT OF A MICROPROCESSOR INTERFACE TO A SCANNING ELECTRON-MICROSCOPE

被引：0

作者：

RAJA, NKL ^{[1
]}

KARKARE, VG ^{[1
]}

DAVID, SK ^{[1
]}

机构：

[1] UNIV POONA,DEPT ELECTR SCI,POONA 411007,MAHARASHTRA,INDIA

来源：

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT | 1989年 / 38卷 / 04期

关键词：

D O I：

10.1109/19.31012

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：907 / 912

页数：6

相关论文

共 13 条

[1] FAZEKAS P, 1981, ELECTRONICS 0714, P105
[2] GRUNDY PJ, 1976, ELECTRON MICROS, P58
[3] KARKARE VG, 1987, CEERI CEERISDARR87 S
[4] OATLEY CW, 1972, SCANNING ELECTRON 1
[5] A GENERAL SIMULATOR FOR VLSI LITHOGRAPHY AND ETCHING PROCESSES .2. APPLICATION TO DEPOSITION AND ETCHING
OLDHAM, WG
NEUREUTHER, AR
SUNG, C
REYNOLDS, JL
NANDGAONKAR, SN
[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1980, 27 (08) : 1455 - 1459
[6] ORON M, 1976, SEM76, V1, P121
[7] SINGH A, 1983, 2ND P INT C PHYS SEM
[8] TAMAMA T, 1986, IEEE DESIGN TEST AUG, P23
[9] UNITT BM, 1978, SCANNING ELECTRON MI, V1, P27
[10] Ura K., 1984, JEOL News, Electron Optics Instrumentation, V22E, P31