THICKNESS MEASUREMENT OF TITANIUM NITRIDE LAYERS ON STEEL USING PIXE AND PROTON BACKSCATTERING

被引：7

作者：

CAMPBELL, JL ^{[1
]}

TEESDALE, WJ ^{[1
]}

MAXWELL, JA ^{[1
]}

PROZESKY, VM ^{[1
]}

机构：

[1] ATOM ENERGY CORP S AFRICA,PRETORIA 001,SOUTH AFRICA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1994年 / 85卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(94)95795-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

RBS, PES (proton enhanced scattering) and PIXE were used to measure the thickness of TiN layers deposited on steel by plasma vapour deposition. Backscattering data were treated using RUMP with modified cross sections; PIXE data were treated by an extension of GUPIX which handles multilayer specimens. Agreement at the level of a few percent was obtained for thicknesses in the range of 1-5 mum.

引用

页码：108 / 111

页数：4

共 19 条

[1]

[Anonymous], 1988, PIXE NOVEL TECHNIQUE

[2]

Chu W.K., 1977, BACKSCATTERING SPECT

[3] COMPLEMENTARITY OF RBS, PIGE AND PIXE FOR THE DETERMINATION OF SURFACE-LAYERS OF THICKNESSES UP TO 30 MICRONS [J].