SUB-MICRON ELECTRON-BEAM PATTERNING OF ALUMINUM BY A DOUBLE-LAYER PATTERN TRANSFER TECHNIQUE

被引：3

作者：

SATO, M

KAWABUCHI, K

YOSHIMI, M

YAMAZAKI, T

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 04期

关键词：

D O I：

10.1116/1.571270

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1329 / 1332

页数：4

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