PROPERTIES OF FLUOROCARBON FILMS PREPARED BY RF SPUTTERING AND PLASMA POLYMERIZATION IN INERT AND ACTIVE GAS

被引：74

作者：

BIEDERMAN, H ^{[1
]}

OJHA, SM ^{[1
]}

HOLLAND, L ^{[1
]}

机构：

[1] UNIV SUSSEX,SCH ENGN & APPL SCI,PLASMA MAT PROC,BRIGHTON,SUSSEX,ENGLAND

来源：

THIN SOLID FILMS | 1977年 / 41卷 / 03期

关键词：

D O I：

10.1016/0040-6090(77)90319-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：329 / 339

页数：11

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