PROPERTIES OF FLUOROCARBON FILMS PREPARED BY RF SPUTTERING AND PLASMA POLYMERIZATION IN INERT AND ACTIVE GAS

被引：73
作者：
BIEDERMAN, H [1 ]
OJHA, SM [1 ]
HOLLAND, L [1 ]
机构：
[1] UNIV SUSSEX,SCH ENGN & APPL SCI,PLASMA MAT PROC,BRIGHTON,SUSSEX,ENGLAND
来源：
THIN SOLID FILMS | 1977年 / 41卷 / 03期
关键词：
D O I：
10.1016/0040-6090(77)90319-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：329 / 339
页数：11
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