AN INVESTIGATION OF ION-BOMBARDED AND ANNEALED (111) SURFACES OF GE BY SPECTROSCOPIC ELLIPSOMETRY

被引：55
作者：
ASPNES, DE
STUDNA, AA
机构：
来源：
SURFACE SCIENCE | 1980年 / 96卷 / 1-3期
关键词：
D O I：
10.1016/0039-6028(80)90308-8
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：294 / 306
页数：13
相关论文
共 20 条
[1]   OPTICAL-PROPERTIES OF AU - SAMPLE EFFECTS [J].
ASPNES, DE ;
KINSBRON, E ;
BACON, DD .
PHYSICAL REVIEW B, 1980, 21 (08) :3290-3299
[2]   HIGH PRECISION SCANNING ELLIPSOMETER [J].
ASPNES, DE ;
STUDNA, AA .
APPLIED OPTICS, 1975, 14 (01) :220-228
[3]   INVESTIGATION OF EFFECTIVE-MEDIUM MODELS OF MICROSCOPIC SURFACE-ROUGHNESS BY SPECTROSCOPIC ELLIPSOMETRY [J].
ASPNES, DE ;
THEETEN, JB .
PHYSICAL REVIEW B, 1979, 20 (08) :3292-3302
[4]   NONDESTRUCTIVE CHARACTERIZATION OF INTERFACE LAYERS BETWEEN SI OR GAAS AND THEIR OXIDES BY SPECTROSCOPIC ELLIPSOMETRY [J].
ASPNES, DE ;
THEETEN, JB ;
CHANG, RPH .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (05) :1374-1378
[5]   EFFECTS OF COMPONENT OPTICAL-ACTIVITY IN DATA REDUCTION AND CALIBRATION OF ROTATING-ANALYZER ELLIPSOMETERS [J].
ASPNES, DE .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (06) :812-819
[6]   METHODS FOR DRIFT STABILIZATION AND PHOTOMULTIPLIER LINEARIZATION FOR PHOTOMETRIC ELLIPSOMETERS AND POLARIMETERS [J].
ASPNES, DE ;
STUDNA, AA .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1978, 49 (03) :291-297
[7]  
ASPNES DE, 1977, OPTICAL POLARIMETRY, V112, P62
[8]  
ASPNES DE, 1980, P S LAS ELECT BEAM P, V80, P414
[9]  
BATZ B, 1972, SEMICONDUCT SEMIMET, V9, P315
[10]   Calculation of various physics constants in heterogenous substances I Dielectricity constants and conductivity of mixed bodies from isotropic substances [J].
Bruggeman, DAG .
ANNALEN DER PHYSIK, 1935, 24 (07) :636-664
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