OPTICAL TECHNIQUE FOR PRODUCING 0.1-MU PERIODIC SURFACE-STRUCTURES

被引:88
作者
SHANK, CV [1 ]
SCHMIDT, RV [1 ]
机构
[1] BELL TEL LABS INC, HOLMDEL, NJ 07733 USA
关键词
D O I
10.1063/1.1654841
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:154 / 155
页数:2
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