THERMODYNAMIC ASSESSMENT OF THE SILICON - OXYGEN SYSTEM

被引：39

作者：

HALLSTEDT, B

机构：

[1] Division of Physical Metallurgy, Royal Institute of Technology

来源：

CALPHAD-COMPUTER COUPLING OF PHASE DIAGRAMS AND THERMOCHEMISTRY | 1992年 / 16卷 / 01期

关键词：

D O I：

10.1016/0364-5916(92)90038-Y

中图分类号：

O414.1 [热力学];

学科分类号：

摘要：

A thermodynamic assessment of the Si-O system has been made using a computerized CALPHAD (calculation of phase diagrams) technique. The liquid phase is described by a two-sublattice model for ionic liquids and the solid solution of oxygen in silicon is described by a regular solution model. A set of parameters describing the Gibbs energies of the different phases is given and calculated phase diagrams are presented.

引用

页码：53 / 61

页数：9

共 22 条

[1]

BARRY TI, 1987, UNPUB

[2] SOLUBILITY OF CARBON IN PULLED SILICON CRYSTALS [J].