RADIOMETRIC CHARACTERIZATION OF A PENNING DISCHARGE IN THE VACUUM-ULTRAVIOLET

被引:44
作者
HEISE, C [1 ]
HOLLANDT, J [1 ]
KLING, R [1 ]
KOCK, M [1 ]
KUHNE, M [1 ]
机构
[1] PHYS TECH BUNDESANSTALT BERLIN, D-10587 BERLIN, GERMANY
来源
APPLIED OPTICS | 1994年 / 33卷 / 22期
关键词
VUV RADIATION STANDARD; PENNING DISCHARGE;
D O I
10.1364/AO.33.005111
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We present a Penning discharge as a possible radiometric transfer standard source in the vacuum UV, primarily in the spectral region below 20 nm. Following the concept of Finley et al., we have designed a Penning source using NdFeB permanent magnets. Emphasis was put on simple operation, quick electrode exchangeability, and easy source readjustment. The radiant intensities of the emission lines from different ionization stages of both buffer gas atoms and atoms sputtered from the cathodes have been studied in various discharge conditions. For selected Al and buffer gar, emission lines we determined the absolute radiant intensities by a comparison with the calculable spectral radiant power of the Berlin Electron Storage Ring. A comparison with data from our hollow-cathode transfer standard source is given.
引用
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页码:5111 / 5117
页数:7
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