SIMULTANEOUS OBSERVATION OF SUBTHRESHOLD AND ABOVE-THRESHOLD ELECTRON-IRRADIATION INDUCED DEFECTS IN GAAS

被引:16
作者
AURET, FD
BREDELL, LJ
MYBURG, G
BARNARD, WO
机构
[1] Physics Department, University of Pretoria, Pretoria
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷 / 01期
关键词
D O I
10.1143/JJAP.30.80
中图分类号
O59 [应用物理学];
学科分类号
摘要
Sub- and above threshold defects were introduced in n-type OMVPE grown GaAs during 3 keV and 3 MeV electron irradiation, respectively. The electrical properties of these defects were determined by DLTS measurements in samples that contained subthreshold defects only, above threshold defects only, as well as samples contained both type of defects. A careful examination of the low temperature DLTS peaks revealed that although the sub- and above threshold defects have similar properties, they are nevertheless distinguishable from each other and are therefore not the same as has previously been speculated.
引用
收藏
页码:80 / 83
页数:4
相关论文
共 10 条
[1]  
BREDELL LJ, 1990, UNPUB J VAC SCI TECH
[2]   PENETRATION AND ENERGY-LOSS THEORY OF ELECTRONS IN SOLID TARGETS [J].
KANAYA, K ;
OKAYAMA, S .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1972, 5 (01) :43-&
[3]  
Lang D. V., 1977, I PHYS C SER, V31, P70
[4]  
LANG DV, 1974, J APPL PHYS, V45, P3203
[5]  
MYBURG G, 1990, UNPUB REV SCI INSTRU
[6]   DEFECT FORMATION IN GAAS BY SUBTHRESHOLD ENERGY (0.2-3 KEV) ELECTRON-IRRADIATION [J].
NEL, M ;
AURET, FD .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1989, 28 (12) :2430-2435
[7]   DEEP-LEVEL TRANSIENT SPECTROSCOPY DETECTION OF DEFECTS CREATED IN EPITAXIAL GAAS AFTER ELECTRON-BEAM METALLIZATION [J].
NEL, M ;
AURET, FD .
JOURNAL OF APPLIED PHYSICS, 1988, 64 (05) :2422-2425
[8]   AN ANNEALING STUDY OF ELECTRON IRRADIATION-INDUCED DEFECTS IN GAAS [J].
PONS, D ;
MIRCEA, A ;
BOURGOIN, J .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (08) :4150-4157
[9]   IRRADIATION-INDUCED DEFECTS IN GAAS [J].
PONS, D ;
BOURGOIN, JC .
JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1985, 18 (20) :3839-3871
[10]   ENERGY-DEPENDENCE OF DEEP LEVEL INTRODUCTION IN ELECTRON-IRRADIATED GAAS [J].
PONS, D ;
MOONEY, PM ;
BOURGOIN, JC .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (04) :2038-2042