STRUCTURAL AND ELECTRICAL-PROPERTIES OF TI-AL THIN-FILMS

被引：1
|
作者：
GORECKADRZAZGA, A [1 ]
ZIOLOWSKI, Z [1 ]
机构：
[1] INST FERROUS MET,GLIWICE,POLAND
来源：
THIN SOLID FILMS | 1979年 / 62卷 / 02期
关键词：
D O I：
10.1016/0040-6090(79)90301-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：151 / 155
页数：5
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