MEASUREMENTS OF ENERGY-DISTRIBUTIONS AND YIELDS OF NEUTRAL CU-2 AND CU-3 SPECIES SPUTTERED FROM CU BY LOW-ENERGY AR+ IONS

被引：31
作者：
BRIZZOLARA, RA [1 ]
COOPER, CB [1 ]
机构：
[1] UNIV DELAWARE,DEPT PHYS,NEWARK,DE 19716
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 43卷 / 02期
关键词：
D O I：
10.1016/0168-583X(89)90026-8
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：136 / 145
页数：10
相关论文
共 32 条
[1]  
BERNHARDT F, 1976, NUCL INSTRUM METHODS, V137, P329
[2]   ENERGY-DISTRIBUTIONS OF NEUTRAL ATOMS SPUTTERED BY VERY LOW-ENERGY HEAVY-IONS [J].
BRIZZOLARA, RA ;
COOPER, CB ;
OLSON, TK .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 35 (01) :36-42
[3]   EXPERIMENTS ON THE SPUTTERING OF NEUTRAL CU-2 DIMERS FROM CU BY AR+ IONS (60-300 EV) [J].
COOPER, CB ;
HAMED, HA .
SURFACE SCIENCE, 1984, 143 (01) :215-222
[4]   INTERNAL ENERGY-DISTRIBUTION OF SPUTTERED SULFUR MOLECULES [J].
DEJONGE, R ;
BALLER, T ;
TENNER, MG ;
DEVRIES, AE ;
SNOWDON, KJ .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 17 (03) :213-226
[5]  
GARRISON B, 1979, J VAC SCI TECHNOL, V16, P77
[6]   MASS-SPECTROMETRY OF NEUTRAL MOLECULES SPUTTERED FROM POLYCRYSTALLINE METALS BY AR+-IONS OF 100-1000 EV [J].
GERHARD, W ;
OECHSNER, H .
ZEITSCHRIFT FUR PHYSIK B-CONDENSED MATTER, 1975, 22 (01) :41-48
[7]  
GERHARD W, 1975, Z PHYS B CON MAT, V22, P31, DOI 10.1007/BF01325457
[8]  
GIBER J, 1980, S SPUTTERING, P697
[9]   ON THE ENERGY AND ANGULAR-DISTRIBUTION OF SPUTTERED POLYATOMIC-MOLECULES [J].
HARING, RA ;
ROOSENDAAL, HE ;
ZALM, PC .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 28 (02) :205-213
[10]   REACTIVE SPUTTERING OF SIMPLE CONDENSED GASES BY KEV IONS .3. KINETIC-ENERGY DISTRIBUTIONS [J].
HARING, RA ;
PEDRYS, R ;
OOSTRA, DJ ;
HARING, A ;
DEVRIES, AE .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 5 (03) :483-488
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