THE CHARACTERIZATION OF AN IMAGING TIME-OF-FLIGHT SECONDARY ION MASS-SPECTROMETRY INSTRUMENT

被引:49
|
作者
ECCLES, AJ [1 ]
VICKERMAN, JC [1 ]
机构
[1] UNIV MANCHESTER,INST SCI & TECHNOL,SURFACE ANAL RES CTR,MANCHESTER M60 1QD,LANCS,ENGLAND
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 02期
关键词
D O I
10.1116/1.576125
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:234 / 244
页数:11
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