SPUTTERED YTTRIA PARTIALLY-STABILIZED ZIRCONIA LAYERS APPLIED TO THIN-FILM HEAT FLUXMETERS

被引：0
|
作者：
GODEFROY, JC
CLERY, M
DIOT, C
KAYSER, P
GAGEANT, C
机构：
来源：
SURFACE & COATINGS TECHNOLOGY | 1992年 / 54卷 / 1-3期
关键词：
D O I：
10.1016/0257-8972(92)90179-E
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Yttria partially stabilized zirconia (YPSZ) was selected to provide the thermal resistance of high temperture thin film fluxmeters for use in turbomachinery experimentation (up to 1000-1100-degrees-C). Study of the sensor requires knowledge of the physical properties of this material such as structure and microstructure, adhesion, thermal ageing resistance, electrical insulation and thermal conductivity. Measurements of these properties, on 10 mum thick layers deposited by r.f. cathodic sputtering, are presented.
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页码：308 / 314
页数：7
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