PROCESS PARAMETERS OPTIMIZATION FOR LASER DEPOSITION OF HIGH-TC SUPERCONDUCTING THIN-FILMS ON SI AND OTHER SUBSTRATE MATERIALS

被引：1

作者：

VISPUTE, RD

BENDRE, ST

VISWANATHAN, R

CHAUDHARI, SM

KANETKAR, SM

OGALE, SB

机构：

[1] Centre for Advanced Studies in Materials Science and Solid State Physics, Department of Physics, University of Poona, Pune

来源：

BULLETIN OF MATERIALS SCIENCE | 1991年 / 14卷 / 02期

关键词：

SUPERCONDUCTING THIN FILMS; Y-BA-CU-O; SI; LASER DEPOSITION;

D O I：

10.1007/BF02747354

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin films of Y-Ba-Cu-O superconductor have been deposited on different substrates by pulsed excimer laser ablation form a superconducting pellet. The dependence of various process parameters such as substrate temperature, laser energy density, oxygen partial pressure, applied bias field and cooling rates on the quality of the films has been studied.

引用

页码：443 / 449

页数：7

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