X-RAY PHOTOELECTRON-SPECTROSCOPY AND AUGER-ELECTRON SPECTROSCOPY STUDIES OF GLOW-DISCHARGE SI1-XCX-H FILMS

被引：122
作者：
LEE, WY
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 06期
关键词：
D O I：
10.1063/1.328049
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：3365 / 3372
页数：8
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