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SCANNING TUNNELING MICROSCOPE LITHOGRAPHY - A SOLUTION TO ELECTRON-SCATTERING
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
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ELECTRON-BEAM LITHOGRAPHY FROM 20 TO 120 KEV WITH A HIGH-QUALITY BEAM
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Joy D. C., 1983, Microelectronic Engineering, V1, P103, DOI 10.1016/0167-9317(83)90024-2
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100 KV THERMAL FIELD-EMISSION ELECTRON-BEAM LITHOGRAPHY TOOL FOR HIGH-RESOLUTION X-RAY MASK PATTERNING
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
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PROXIMITY EFFECT REDUCTION IN X-RAY MASK MAKING USING THIN SILICON DIOXIDE LAYERS
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1992, 10 (06)
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PATTERNING TUNGSTEN FILMS WITH AN ELECTRON-BEAM LITHOGRAPHY SYSTEM AT 50 KEV FOR X-RAY MASK APPLICATIONS
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
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