STRAIN RELAXATION PHENOMENA IN GEXSI1-X/SI STRAINED STRUCTURES

被引：52
作者：
HULL, R
BEAN, JC
EAGLESHAM, DJ
BONAR, JM
BUESCHER, C
机构：
来源：
THIN SOLID FILMS | 1989年 / 183卷
关键词：
D O I：
10.1016/0040-6090(89)90437-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：117 / 132
页数：16
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