ENERGY SPREAD AND ION CURRENT MEASUREMENTS OF SEVERAL ION SOURCES

被引:34
作者
GAUS, AD [1 ]
HTWE, WT [1 ]
BRAND, JA [1 ]
GAY, TJ [1 ]
SCHULZ, M [1 ]
机构
[1] UNIV MISSOURI,ATOM & MOLEC RES LAB,ROLLA,MO 65401
关键词
D O I
10.1063/1.1144500
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Energy spread and extracted current measurements are presented for five different types of ion sources: hot cathode, cold cathode, magnetron, microwave, and electron cyclotron resonance (ECR). The measurements were performed with a 45° parallel-plate energy analyzer with a resolution of better than 0.5 eV at 500 eV incident energy. Energy spreads ranged from 0.5 to 4 eV, while total extracted beam currents ranged from 2 to 30 μA. Beam currents due specifically to protons, 3He++ ions, and H +2 ions are also presented. The ECR and magnetron sources gave the best overall performance. These, along with the energy analyzer, are currently being used in experiments to study ion-atom collision physics. © 1994 American Institute of Physics.
引用
收藏
页码:3739 / 3745
页数:7
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