NEW SYSTEM FOR CHEMICAL VAPOR-DEPOSITION OF SIC

被引：0
|
作者：
CALLAGHA.MP
BRANDER, RW
机构：
来源：
JOURNAL OF CRYSTAL GROWTH | 1971年 / 13卷 / MAY期
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暂无
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
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页码：397 / &
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