FORMATION OF BURIED NITRIDE LAYERS BY ION-IMPLANTATION

被引：4
|
作者：
DANILOWITSCH, J
GARTNER, K
GOTZ, G
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1988年 / 32卷 / 1-4期
关键词：
D O I：
10.1016/0168-583X(88)90252-2
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：437 / 439
页数：3
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