A COMPACT ELECTRON-BEAM METAL VAPOR SOURCE WITH INTEGRAL COOLING AND SHUTTER

被引：8
|
作者：
TAYLOR, JSG
NEWSTEAD, DA
机构：
来源：
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1987年 / 20卷 / 10期
关键词：
ELECTRON BEAMS - Applications;
D O I：
10.1088/0022-3735/20/10/033
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A simple compact ultra-high-vacuum (UHV) electron-beam evaporator, to deposit ultra-thin layers of low vapor pressure, high melting point transition metals is described. It has an integral cryoshield and shutter which will fit a UHV system with a standard 70 mm flange. The unit has reliably evaporated for 40 h and appears to have used less than 30 mg of sample.
引用
收藏
页码：1288 / 1289
页数：2
相关论文
共 50 条
  • [1] Electron-beam enhancement of the metal vapor vacuum arc ion source
    Batalin, VA
    Bugaev, AS
    Gushenets, VI
    Hershcovitch, A
    Johnson, BM
    Kolomiets, AA
    Kuibeda, RP
    Kulevoy, TV
    Oks, EM
    Pershin, VI
    Petrenko, SV
    Seleznev, DN
    Yushkov, GY
    JOURNAL OF APPLIED PHYSICS, 2002, 92 (05) : 2884 - 2889
  • [2] CARBON DOPING BY A COMPACT ELECTRON-BEAM SOURCE
    VANHOVE, JM
    CHOW, PP
    ROSAMOND, MF
    CARPENTER, GL
    CHOW, LA
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (02): : 1200 - 1202
  • [3] A COMPACT FLANGE-MOUNTED ELECTRON-BEAM SOURCE
    JONKER, BT
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (05): : 3883 - 3886
  • [4] A METAL VAPOR LASER WITH TRANSVERSE PUMPING BY AN ELECTRON-BEAM
    GARUSOV, KA
    KUZNETSOV, DL
    NOVOSELOV, YN
    UVARIN, VV
    INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 1992, 35 (03) : 519 - 521
  • [5] Injection of metallic elements into an electron-beam ion trap using an electron impact metal vapor source
    Kimura, Naoki
    Kiyama, Genichi
    Ito, Daiki
    Nakamura, Nobuyuki
    JOURNAL OF PHYSICS B-ATOMIC MOLECULAR AND OPTICAL PHYSICS, 2023, 56 (18)
  • [6] COMPACT ELECTRON-BEAM SOURCE FOR FORMATION OF NEUTRAL BEAMS OF VERY LOW VAPOR-PRESSURE MATERIALS
    RUTHERFORD, JA
    VROOM, DA
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1978, 49 (07): : 1008 - 1010
  • [7] EVAPORATIVE COOLING IN THE DIONE ELECTRON-BEAM ION-SOURCE
    VISENTIN, B
    FAURE, J
    GOBIN, R
    LEROY, PA
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1992, 313 (1-2): : 23 - 25
  • [8] ELECTRON COOLING WITH AN ULTRACOLD ELECTRON-BEAM
    DANARED, H
    ANDLER, G
    BAGGE, L
    HERRLANDER, CJ
    HILKE, J
    JEANSSON, J
    KALLBERG, A
    NILSSON, A
    PAAL, A
    RENSFELT, KG
    ROSENGARD, U
    STARKER, J
    AFUGGLAS, M
    PHYSICAL REVIEW LETTERS, 1994, 72 (24) : 3775 - 3778
  • [9] ELECTRON-BEAM FOR THE FERMILAB ELECTRON COOLING EXPERIMENT
    HERRMANNSFELDT, WB
    KELLS, W
    MCINTYRE, PM
    MILLS, F
    MISEK, J
    OLEKSIUK, L
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1979, 26 (03) : 3237 - 3240
  • [10] AN INTENSE ELECTRON-BEAM SOURCE
    YEHESKEL, J
    GAZIT, D
    AVIDA, R
    FRIEDMAN, M
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1983, 16 (04) : 499 - 504
12345