TITANIUM SILICIDE FORMATION BY ION-BEAM MIXING AND RAPID THERMAL ANNEALING

被引：13
作者：
MATTIUSSI, GA
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1986年 / 4卷 / 06期
关键词：
D O I：
10.1116/1.583457
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页码：1352 / 1357
页数：6
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