A NEW 3-DIMENSIONAL NON-CONTACT DIGITAL OPTICAL PROFILER

被引：46
|
作者：
BHUSHAN, B
WYANT, JC
MEILING, J
机构：
[1] IBM CORP,TUCSON,AZ 85744
[2] UNIV ARIZONA,CTR OPT SCI,TUCSON,AZ 85721
[3] WYCO CORP,TUCSON,AZ 85719
来源：
WEAR | 1988年 / 122卷 / 03期
关键词：
D O I：
10.1016/0043-1648(88)90016-6
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
引用
收藏
页码：301 / 312
页数：12
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