A NOVEL CMOS FLOW SENSOR WITH CONSTANT CHIP TEMPERATURE (CCT) OPERATION

被引：10

作者：

TONG, QY

HUANG, JB

机构：

[1] Nanjing Inst of Technology, Nanjing, China, Nanjing Inst of Technology, Nanjing, China

来源：

SENSORS AND ACTUATORS | 1987年 / 12卷 / 01期

关键词：

D O I：

10.1016/0250-6874(87)87002-6

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：9 / 21

页数：13

共 9 条

[1]

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[2] MONOLITHIC INTEGRATED DIRECTION-SENSITIVE FLOW SENSOR [J].

HUIJSING, JH ;

SCHUDDEMAT, JP ;

VERHOEF, W .

[3]

MULLER RS, 1977, DEVICE ELECTRONICS I, P25

[4]

PLATZER GE, 1976, Patent No. 3992940

[5]

Polla D. L., 1983, International Electron Devices Meeting 1983. Technical Digest, P639

[6]

RATHAKNMAR KN, 1982, IEEE J SOLID STATE C, V17, P937

[7]

RICHMAN P, 1973, MOS FIELD EFFECT TRA, P129

[8]

TONG QY, 1984, APR INT VAC SCH VLSI

[9]

TONG QY, 1982, MICROELECTRON J, V13, P29