DUMMY LOAD TECHNIQUE FOR POWER EFFICIENCY ESTIMATION IN RF DISCHARGES

被引：8

作者：

SAVAS, SE

HORNE, DE

SADOWSKI, RW

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1986年 / 57卷 / 07期

关键词：

D O I：

10.1063/1.1138636

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：1248 / 1250

页数：3

共 8 条

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[3]

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[7] POWER DISSIPATED IN LOW-PRESSURE RADIO-FREQUENCY DISCHARGE PLASMAS [J].

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GODYAK, VA .

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[8]

VANROOSMALEN AJ, UNPUB

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