HETEROGENEITIES AND SURFACE EFFECTS IN GLOW-DISCHARGE DEPOSITED HYDROGENATED AMORPHOUS-SILICON FILMS

被引：24
作者：
FRITZSCHE, H [1 ]
机构：
[1] UNIV CHICAGO,JAMES FRANCK INST,CHICAGO,IL 60637
来源：
THIN SOLID FILMS | 1982年 / 90卷 / 02期
关键词：
D O I：
10.1016/0040-6090(82)90631-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：119 / 129
页数：11
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