HYDROGEN IN SEMI-INSULATING POLYCRYSTALLINE SILICON FILMS

被引：44
|
作者：
KNOLLE, WR [1 ]
MAXWELL, HR [1 ]
BENENSON, RE [1 ]
机构：
[1] SUNY ALBANY,DEPT PHYS,ALBANY,NY 12222
来源：
JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 08期
关键词：
D O I：
10.1063/1.328302
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：4385 / 4390
页数：6
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